晶圆作业控制系统

Wafer operation control system

Abstract

本发明公开了一种晶圆作业控制系统,所述系统包括存储模块和执行模块;所述存储模块储存有各批次晶圆进行生产工艺时需要经过的腔室顺序;其中一批次晶圆在进入一反应腔室进行生产工艺时,所述执行模块读取存储模块中储存该批次晶圆需要经过腔室的顺序并执行该操作,使得该批次晶圆分别在不同的腔室内完成所有的生产工序。技术人员通过本发明根据电学性能检测结果可很快判断出问题腔室所在及相应的生产设备,极大提高了发现问题工序的效率,同时还可根据实际情况及时调整各腔室内的工艺顺序,以适应各种生产情况。
The invention discloses a wafer operation control system. The system comprises a storage module and an execution module; the storage module stores sequences of chambers which wafers in each batch pass through when the chambers are processed; and when wafers in one batch enter a reaction chamber so as to be processed, the execution module reads a sequence of chambers which the wafers in the batch pass through and executes operation, wherein the sequence of the chambers in the batch is stored in the storage module, and the wafers in the batch respectively enter different chambers such that all production processes of the wafers can be completed. With the wafer operation control system adopted, technicians can quickly determine chambers where problems exist and corresponding production equipment according to electrical performance test results, and therefore, undesirable process finding efficiency can be greatly improved;, and at the same time, process sequence inside each chamber can be timely adjusted according to actual situations, such that the wafer operation control system can adapt to all kinds of production situations.

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