大口径光学元件轮廓的一次拼接测量装置

One-time splicing measurement device of large-aperture optical element profile

Abstract

大口径光学元件轮廓的一次拼接测量装置,涉及一种光学元件轮廓的测量装置。设有Y轴直线电机、Y轴直线导轨、底座、运动控制器、立柱、横梁、测量传感器、直线运动丝杆螺母副、联轴器、测头运动驱动电机、Z轴直线导轨、Z轴直线电机、测头连接座、Z轴工作台、X轴工作台、X轴直线导轨、X轴直线电机、工件、工件回转台、连接座、旋转电机、Y轴工作台和计算机。可实现一次拼接测量,特别针对大口径工件减少了测量步骤,测量过程简单,测量效率高,结构简单紧凑,操作方便。
The invention provides a one-time splicing measurement device of a large-aperture optical element profile, relating to a measurement device of an optical element profile. The one-time splicing measurement device is provided with a Y-axis linear motor, Y-axis linear guide rails, a base, a movement controller, a stand column, a cross beam, a measurement sensor, a linear motion lead screw nut pair, a coupling, a measuring head movement driving motor, Z-axis linear guide rails, a Z-axis linear motor, a measuring head connecting base, a Z-axis workbench, an X-axis workbench, X-axis linear guide rails, an X-axis linear motor, a workpiece, a workpiece rotary table, a connecting base, a rotary motor, a Y-axis workbench and a computer. The one-time splicing measurement device can realize one-time splicing measurement; particularly specific to a large-aperture workpiece, measurement steps are reduced by adopting the measurement device; the one-time splicing measurement device is simple in measurement process, high in measurement efficiency, simple and compact in structure and convenient to operate.

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Cited By (1)

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    CN-104898413-ASeptember 09, 2015上海大学大行程高分辨率驱动器系统