Acoustic surface wave gas sensor with three-dimensional nano structure

一种三维纳米结构声表面波气敏传感器

Abstract

The invention relates to an acoustic surface wave gas sensor with a three-dimensional nano structure. The acoustic surface wave gas sensor comprises a piezoelectric substrate, an input interdigital electrode IDT 1 (interdigital transducer 1) and an output interdigital electrode IDT 2 which are arranged on the surface of the piezoelectric substrate and are mutually parallel, and a sensitive area, wherein the sensitive area is located between the interdigital electrode IDT 1 and the interdigital electrode IDT 2, a three-dimensional nano structure sensitive film is arranged on the sensitive area, and comprises a modified three-dimensional nano wire or nano pipe growing on the sensitive area, and a sensitive film applied to the surface of the sensitive area, and the sensitive film is attached to the outer surface of the three-dimensional nano wire or nano pipe. The gas sensor is high in integration degree, small in size, light in weight, low in cost, wide in application range, capable of working at a room temperature and high in sensitivity in detection of a low-concentration gas, and more importantly is capable of rapidly and reliably detecting multiple kinds of gases.
本发明涉及一种三维纳米结构声表面波气敏传感器,包括压电基底,置于该压电基底表面且相互平行的输入叉指电极IDT1和输出叉指电极IDT2以及敏感区,敏感区位于输入叉指电极IDT1和输出叉指电极IDT2之间,敏感区上具有三维纳米结构敏感膜,三维纳米结构敏感膜包括生长在敏感区上的改性三维纳米线或纳米管及涂覆在敏感区表面的敏感膜,改性三维纳米线或纳米管是在外表面附着有敏感膜的三维纳米线或纳米管。该气敏传感器集成度高、小体积、重量轻成本低,适用范围广,可在室温下工作,对低浓度气体检测时灵敏度高,更重要的是可以对多种气体进行快速、可靠的检测。

Claims

Description

Topics

Download Full PDF Version (Non-Commercial Use)

Patent Citations (8)

    Publication numberPublication dateAssigneeTitle
    CN-101634643-AJanuary 27, 2010鸿富锦精密工业(深圳)有限公司;鸿海精密工业股份有限公司Surface acoustic wave sensor
    CN-101644696-AFebruary 10, 2010中国科学院声学研究所Love wave gas sensor
    CN-102375030-AMarch 14, 2012中国科学院微电子研究所一种制作半导体薄膜材料的方法
    CN-103336051-AOctober 02, 2013中国电子科技集团公司第二十六研究所气体传感器用声表面波敏感器件
    CN-204008364-UDecember 10, 2014中国电子科技集团公司第二十六研究所SAW (surface acoustic wave) sensor adopting three-dimensional nano-structure
    JP-2006220508-AAugust 24, 2006Shimadzu Corp, 株式会社島津製作所Gas sensor
    KR-20100050366-AMay 13, 2010삼성전자주식회사표면 탄성파 소자, 표면 탄성파 장치 및 이들의 제조 방법
    US-2009272193-A1November 05, 2009Murata Manufacturing Co., Ltd.Surface acoustic wave sensor

NO-Patent Citations (1)

    Title
    FU-CHUN HUANG: "a room temperature surface scoustic wave hydrogen sensor with Pt coated ZnO nanorods", 《NANOTECHNOLOGY》, 31 December 2009 (2009-12-31), XP020153150, DOI: doi:10.1088/0957-4484/20/6/065501

Cited By (2)

    Publication numberPublication dateAssigneeTitle
    CN-104697882-AJune 10, 2015北京工业大学Mass sensor for ambient air PM (particulate matter)2.5 based on ZnO nanowire array and preparation method for mass sensor
    CN-104697882-BJuly 21, 2017北京工业大学一种基于ZnO纳米线阵列的环境空气PM2.5颗粒物的质量传感器件及其制备方法